WVCP6000 Mvura Yehutsi Cryopump Cryogenic Refrigeration Systems
Product Description
Guangzhou Xieyi Automation Technology Co., Ltd., iyo yakavambwa muna 2011, ndiyo yakasarudzika bhizinesi repamusoro-soro muSouth China iro rinoita mukutsvagisa, kugadzira, kubvunzana kwehunyanzvi uye sevhisi yemapombi emvura akadzika-akadzika emvura anobatwa uye nezvimwe. Ultra-yakaderera tembiricha midziyo.
XIEYI WVCP Cryochillers akavharwa loop cryogenic refrigeration systems inopa 550 watts ~ 6,000 watts yekutonhodza.Aya macryochiller anogona kushandiswa kubata mhute yemvura nezvimwe zvinhu zvinokoneswa nekuzviomesa nechando panzvimbo inotonhora yakaita seMeissner coil (cryocoil).WVCP cryochillers anoshandiswawo kutonhodza zvinhu senge electrostatic chucks inoshandiswa mu semiconductor wafer processing.
Technical Parameter
| Model | WVCP6000-SH | WVCP6000-DH |
| Yakanyanya kutonhora kugona (W) | 6000 | 6000 |
| Dzidziso yepamusoro yekupomba kumhanya kwetubular inotonhora musungo (L/S) | 588000 | 588000 |
| Iyo dzidziso yekumhanyisa kumhanya kwendiro inotonhora musungo (L/S) | 882000 | 882000 |
| Final vacuum (mbar) | 2*10-8 | 2*10-8 |
| Defrost nguva yenzvimbo inotonhora yekuteya (min) | <5 | <5 |
| Inogadziriswa mhando yekushisa kwe defrost (℃) | -20~30 | -20~30 |
| Pressure control mode | Digital sensor + Mechanical switch | Digital sensor + Mechanical switch |
| Kurumidza kudzoreredza chiyero kudzvanywa basa (QRBP) | Ehe | Ehe |
| Oiri inovharira chiratidzo basa (OBP) | Ehe | Ehe |
| 4G Remote control | Ehe | Ehe |
| Cold media properties | Pro-enviroment | Pro-enviroment |
| Yakakura pamusoro penzvimbo ye tubular inotonhora musungo (㎡) | 4 | 4 |
| Yepamusoro penzvimbo yeplate inotonhora trap(㎡) | 6 | 6 |
| Tsanangudzo yeimwe inotonhora trap (㎡) | φ16mm*80m | / |
| Tsanangudzo yekaviri inotonhora musungo (㎡) | / | 2*φ16mm*40m |
| Gasi interface | 12.7 copper welded junction(Standard) | 12.7 copper welded junction(Standard) |
| ParkerCPI/VCR(Sarudzo) | ParkerCPI/VCR(Sarudzo) | |
| Kuyerera kwemvura inotonhorera (L/Mini pa24 ℃) | 48 | 48 |
| Kutonhora kwearamu yemvura inotonhorera (℃) | 38 | 38 |
| Cooling tower | Ehe | Ehe |
| Mvura inotonhorera yekubatanidza (L/S) | G1” | G1” |
| Simba guru rekutakura (kW) | 25.3 | 25.3 |
| Compressor nominal simba (HP) | 20 | 20 |
| Magetsi (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
| 200-230V AC 3P(L) | 200-230V AC 3P(L) | |
| Dimension(MM) | 935(L)*873(D)*1809(H) | 1235(L)*873(D)*1809(H) |
| Huremu (KG) | 655 | 655 |
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