Evaporation coating: Nekudziisa uye nekupusha chimwe chinhu kuchiisa panzvimbo yakasimba, inodaidzwa kuti evaporation coating.Iyi nzira yakatanga kutaurwa naM. Faraday muna 1857, uye yava imwe ye
inowanzoshandiswa nzira dzokupfekedza mazuva ano.Mamiriro emidziyo yekuputira evaporation inoratidzwa muMufananidzo 1.
Evaporated zvinhu senge simbi, makomisheni, nezvimwewo zvinoiswa mucrucible kana kusungirirwa pawaya inopisa sechinhu chinobuda evaporation, uye workpiece inofanira kuiswa, sesimbi, ceramic, plastiki uye mamwe ma substrates, inoiswa pamberi pe. crucible.Mushure mekunge sisitimu yabviswa kune yakakwira vacuum, iyo crucible inopisa kuti ibudise zviri mukati.Maatomu kana mamorekuru echinhu chinobuda evaporated anoiswa pamusoro pe substrate nenzira yakapfupikiswa.Ukobvu hwefirimu hunogona kubva kumazana eangstroms kusvika kune akati wandei ma microns.Ukobvu hwefirimu hunotarirwa nehuwandu hwekubuda uye nguva yekubuda kwemhepo (kana huwandu hwekurodha), uye hunoenderana nenhambwe pakati penzvimbo uye substrate.Kune machira makuru-akawanda, substrate inotenderera kana akawanda evaporation masosi anowanzoshandiswa kuve nechokwadi chekufanana kweiyo firimu ukobvu.Chinhambwe kubva kunobva kunobva evaporation kuenda kune substrate chinofanirwa kuve chishoma pane nzira yemahara yemamorekuru emhute mugasi rinosara kudzivirira kudhumhana kwemamorekuru emhute nemamorekuru egasi asara kubva pakukonzera makemikari.Avhareji kinetic simba remhute mamorekuru anenge 0.1 kusvika 0.2 electron volts.
Kune marudzi matatu eevaporation sources.
① Resistance heat source: Shandisa simbi dzinoramba dzakaita se tungsten uye tantalum kugadzira chikepe foil kana filament, uye shandisa magetsi kupisa chinhu chinobuda pamusoro payo kana mucrucible (Mufananidzo 1 [Schematic diagram ye evaporation coating equipment] vacuum coating) Resistance heat. tsime rinonyanya kushandiswa kufambisa zvinhu zvakaita seCd, Pb, Ag, Al, Cu, Cr, Au, Ni;
②Yakakwira-frequency induction heat sosi: shandisa yakakwira-frequency induction ikozvino kupisa iyo crucible uye evaporation zvinhu;
③Erekitironi danda rekudziya sosi: inoshanda Kune zvinhu zvine tembiricha yekukwira evaporation (isina kudzika kupfuura 2000 [618-1]), zvinhu zvacho zvinofemeswa nekubhomba zvinhu nematanda erekitironi.
Kuenzaniswa nedzimwe nzira dzekuputira dzevacuum, evaporative coating ine yakakwira deposition rate, uye inogona kuputirwa neyekutanga uye isina-kuora akaomeswa emubatanidzwa mafirimu.
Kuti uise yakakwirira-kuchena imwe chete yekristaro firimu, molecular beam epitaxy inogona kushandiswa.Iyo molecular beam epitaxy mudziyo wekukura doped GaAlAs single crystal layer inoratidzwa muMufananidzo 2 [Schematic diagram ye molecular beam epitaxy device vacuum coating].Iyo jet furnace yakashongedzerwa ine molecular beam sosi.Kana ichidziya kune imwe tembiricha pasi pe-ultra-high vacuum, zvinhu zviri muchoto zvinodzingirwa kune substrate mune danda-rakafanana nemamolekyuli rwizi.Iyo substrate inopisa kune imwe tembiricha, mamorekuru akaiswa pane substrate anogona kutama, uye makristasi anokura mukurongeka kweiyo substrate crystal lattice.Molecular beam epitaxy inogona kushandiswa
kuwana yakakwirira-kuchena komboni single crystal film ine inodiwa stoichiometric ratio.Iyo firimu inokura zvishoma nezvishoma Iyo inomhanya inogona kudzorwa pa 1 single layer/sec.Nekudzora baffle, iyo imwe kristaro firimu ine inodiwa kuumbwa uye chimiro chinogona kuitwa nemazvo.Molecular beam epitaxy inoshandiswa zvakanyanya kugadzira akasiyana-siyana optical akabatanidzwa zvishandiso uye akasiyana superlattice chimiro mafirimu.
Nguva yekutumira: Jul-31-2021